Use of sacrificial masking layer and backside exposure in formin

Details Use of sacrificial masking layer and backside exposure in formin Use of sacrificial masking layer and backside exposure in formin

1997-04-29

2000-04-04

O'Shea, Sandra

Electric lamp and discharge devices

Cathode ray tube

Screen

313466, 313479, 313495, 430 7, 430321, H01J 2910, H01J 3100, H01J 162, H01J 6304

Patent

active

060465395

ABSTRACT:
Openings are created in a structure by a process in which a plate is furnished with a sacrificial patterned masking layer divided into multiple laterally separated mask portions. A primary layer of actinic material is provided over the masking layer and in space between the mask portions. Material of the primary layer not shadowed by a mask formed with the mask portions is backside exposed to actinic radiation. Material of the primary layer not exposed to the radiation is removed. Segments of the masking layer not covered by exposed material of the primary layer are then removed. Consequently, openings extend through the primary layer where the segments of the masking layer have been removed. The process is typically employed in forming an optical device such as a flat-panel cathode-ray tube display in which the openings in the primary layer receive light-emissive material.

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