Use of rotary solenoid as a shutter actuator on a rotating arm

Details Use of rotary solenoid as a shutter actuator on a rotating arm Use of rotary solenoid as a shutter actuator on a rotating arm

1991-12-26

1994-06-21

Nguyen, Nam

Chemistry: electrical and wave energy

Apparatus

Coating, forming or etching by sputtering

20429826, 20429819, 2042982, C23C 1434

Patent

active

053226062

ABSTRACT:
A cold welding system in which a dual sputtering device is carried on a rotatable arm and is rotated into a coating position between two stationary aligned substrates on a press and simultaneously coats both substrates and then is rotated out of the coating position so the coated substrates can be pressed together. A pair of shutters are pivotably connected to the rotatable arm and can be pivoted from a sputtered blocking position, where the shutters block sputtering in a direction towards the substrates, to a sputterer operating position where the shutters permit sputtering towards the substrates.

REFERENCES:
patent: 3573190 (1971-03-01), Bloom
patent: 3616451 (1971-10-01), Gallez
patent: 3661759 (1972-05-01), Bruce et al.
patent: 3756939 (1973-09-01), Hurwitt
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patent: 4175030 (1979-11-01), Love et al.
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patent: 4411763 (1983-10-01), Itaba et al.
patent: 4595483 (1986-06-01), Mahler
patent: 4701251 (1987-10-01), Beardow

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