Use of reticle stitching to provide design flexibility

Details Use of reticle stitching to provide design flexibility Use of reticle stitching to provide design flexibility

1994-12-13

1997-07-29

Thomas, Tom

Fishing, trapping, and vermin destroying

H01L 2182

Patent

active

056521634

ABSTRACT:
A method and apparatus for forming large scale fields suitable for use in the fabrication of integrated circuit structures having submicron dimensions. The method includes subdividing the large scale field into a plurality of subfields along the boundaries of functional components forming a very large scale integrated circuit. Stitching the subfields into the large scale field is then substantially simplified since the number and dimensions of conductive interconnects between the functional components can be more easily accommodated.

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