Use of R.sub.2 MR' to prepare semiconductor and ceramic precurso

Details Use of R.sub.2 MR' to prepare semiconductor and ceramic precurso Use of R.sub.2 MR' to prepare semiconductor and ceramic precurso

1989-06-02

1991-03-26

Prescott, Arthur C.

Organic compounds -- part of the class 532-570 series

Organic compounds

Heavy metal containing

556170, 556174, 556176, 556 30, 556 14, 556 19, C07F 500, C07F 506

Patent

active

050030922

ABSTRACT:
Cyclopentadienyl compounds of aluminum, gallium and indium which when reacted at low temperature with amines, phosphines and arsines form compounds which are potential precursors to ceramic materials and semiconductors.

REFERENCES:
patent: 4740606 (1988-04-01), Melas
patent: 4759917 (1988-07-01), Coleman et al.
A. H. Cowley, B. L. Benac et al., "Organometallic Chemical Vapor Deposition of III/V Compound Semiconductors with Novel Organometallic Precursors," J. Am. Chem. Soc., 110, 6248-6249, 1988.

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