Compositions – Solvents
Patent
1989-07-31
1992-09-29
Bowers, Jr., Charles L.
Compositions
Solvents
524317, 524364, 430331, B01F 100
Patent
active
051512190
ABSTRACT:
A process for removing unwanted photoresist material from the peripheral areas of a photoresist substrate comprising the steps of:
REFERENCES:
patent: 4746558 (1988-05-01), Shimozawa et al.
Love, Jr. Marvin L.
Salamy Thomas E.
Towner Mark E.
Bowers Jr. Charles L.
Chea Thorl
OCG Microelectronic Materials Inc.
LandOfFree
Use of particular mixtures of ethyl lactate and methyl ethyl ket does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Use of particular mixtures of ethyl lactate and methyl ethyl ket, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Use of particular mixtures of ethyl lactate and methyl ethyl ket will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1966657