Use of palladium as an adhesion layer and as an electrode in fer

Details Use of palladium as an adhesion layer and as an electrode in fer Use of palladium as an adhesion layer and as an electrode in fer

1992-04-29

1993-03-02

Griffin, Donald A.

Electricity: electrical systems and devices

Electrostatic capacitors

Fixed capacitor

361321, 365145, 257295, H01G 406, H01G 410, H01L 2702, G11C 1122

Patent

active

051915103

ABSTRACT:
A ferroelectric capacitor for a ferroelectric memory device includes a substrate, a silicon dioxide layer, a palladium adhesion layer, a bottom electrode of platinum, a metal or an alloy, a ferroelectric material and a top electrode of platinum, a metal or an alloy.

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