Use of oxygen-containing gases in fabrication of granular...

Details Use of oxygen-containing gases in fabrication of granular... Use of oxygen-containing gases in fabrication of granular...

2008-04-08

2008-04-08

Bashore, Alain L. (Department: 1762)

Coating processes

Direct application of electrical, magnetic, wave, or...

Pretreatment of substrate or post-treatment of coated substrate

C427S458000, C427S533000, C428S826000

Reexamination Certificate

active

07354630

ABSTRACT:
A granular perpendicular magnetic recording medium, comprising:(a) a non-magnetic substrate having a surface; and(b) a layer stack on the substrate surface, the layer stack including a granular perpendicular magnetic recording layer formed by:(1) reactively sputtering a target comprised of a magnetic alloy in an atmosphere containing at least one ionized oxygen species derived from a source gas comprised of a compound of oxygen and at least one other non-metallic element; and(2) oxidizing an exposed upper surface of the granular perpendicular magnetic recording layer by generating a plasma containing at least one ionized oxygen species derived from a source gas comprised of a compound of oxygen and at least one other non-metallic element and treating the exposed upper surface of the granular perpendicular magnetic recording layer with the plasma.

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