Use of multi-layer thin films as stress sensors

Details Use of multi-layer thin films as stress sensors Use of multi-layer thin films as stress sensors

2006-06-13

2006-06-13

Noori, Max (Department: 2855)

Measuring and testing

Dynamometers

Responsive to multiple loads or load components

Reexamination Certificate

active

07059201

ABSTRACT:
The present invention provides a pressure sensing device that includes at least one TMR sensor, and preferably an array of TMR sensors, with each TMR sensor having an insulating spacer layer interposed between a pinned and a free ferromagnetic layer. In an unbiased state, the magnetization vector of each of the ferromagnetic layers is preferably parallel to each other. Upon application of a small voltage, the magnetization vectors remain unchanged. Upon application of stress, the magnetization vector of the free magnetic layer will rotate, thus causing a corresponding and proportionally related change in the resistance of the sensor. This change in resistance can be sensed and used to calculate the stress applied thereto.

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Notification of Transmittal of IPER, Mar. 11, 2004, PCT/US01/50341.

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