Use of metallic glasses for fabrication of structures with submi

Details Use of metallic glasses for fabrication of structures with submi Use of metallic glasses for fabrication of structures with submi

1985-03-08

1986-12-16

Andrews, Melvyn J.

Stock material or miscellaneous articles

Composite

Of bituminous or tarry residue

357 65, 357 68, 357 71, 428923, H01L 2348

Patent

active

046300945

ABSTRACT:
Patterned structures of submicron dimension formed of supported or unsupported amorphous metals having submicron feature sizes characterized by etching behavior sufficient to allow delineation of sharp edges and smooth flat flanks, resistance to time-dependent dimensional changes caused by creep, flow, in-diffusion of unwanted impurities, out-diffusion of constituent atoms, void formation, grain growth or phase separation and resistance to phase transformations or compound formation.

REFERENCES:
patent: 3675090 (1972-07-01), Neale
patent: 3699543 (1972-10-01), Neale
patent: 3735145 (1973-05-01), Heinz
patent: 3886577 (1975-05-01), Buckley
patent: 3965463 (1976-06-01), Chaudhari
patent: 3988722 (1976-10-01), Keefe
patent: 3996571 (1976-12-01), Chang
patent: 4006276 (1977-02-01), George
patent: 4098917 (1978-07-01), Bullock
patent: 4272348 (1981-06-01), Cox et al.
patent: 4325733 (1982-04-01), Aboaf et al.
patent: 4330848 (1982-05-01), Gambino
"Ion Etching for Pattern Delineation", Meliar-Smith, J. Vac. Sci. Technol., vol. 13, No. 5, Sep./Oct. 1976, pp. 1008, 1020-1021.
"High Resolution Bubble Patterns Obtained by Electron Image Projection", Bril et al., J. Vac. Sci. Technol., 16(6), Nov./Dec. 1979, pp. 1665-1667.
"Fabrication of Micro- and Submicron-Bubble Memory Devices . . . ", Furayama et al., J. Vac. Sci. Technol., 15(3), May/Jun. 1978, pp. 998-1000.
"Electron-Beam Fabrication of High-Density Amorphous Bubble Film Devices", Ahn et al., (IEEE Transactions on Magnetics, vol. MAG-11, No. 5, Sep. 1975).
"Galvanomagnetic Effects in Amorphous Film Alloys", McGuire et al., (IEEE Transactions on Magnetics, vol. MAG-13, No. 5, Sep. 1977).

Affiliated with

Also associated with

Rating

Use of metallic glasses for fabrication of structures with submi does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Use of metallic glasses for fabrication of structures with submi, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Use of metallic glasses for fabrication of structures with submi will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-248451