Use of incompatible materials to eliminate sticking of micro-mec

Details Use of incompatible materials to eliminate sticking of micro-mec Use of incompatible materials to eliminate sticking of micro-mec

1994-03-30

1996-11-19

Phan, James

Optical: systems and elements

Deflection using a moving element

By moving a reflective element

359900, G02B 2608

Patent

active

055768784

ABSTRACT:
A method of preventing adhesion of contacting surfaces of micro-mechanical devices (10). Two materials are selected that are incompatible in the sense that they have at least low solid solubility and preferably, an inability to alloy. One of these materials is used as the first contacting surface (11), and the other as the second contacting surface (17).

REFERENCES:
patent: 5061049 (1991-10-01), Hornbeck
patent: 5331454 (1994-07-01), Hornbeck
L. F. Coffin, Jr., "A Study of the Sliding of Metals, With Particular Reference to Atmosphere", Lubrication Engineering, Jan.-Feb. 1956, pp. 50-59.
Ernest Rabinowicz, "Friction and Wear of Materials", Wiley Series on the Science and Technology of Materials, John Wiley & Sons, Inc., 1965, pp. 70-79.
Ernest Rabinowicz, "Summer Session 2.81s Tribology", Notes from Summer School Class at MIT, Jul. 12-16, 1993.

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