Use of fresnel zone plates for material processing

Optical: systems and elements – Holographic system or element – Using a hologram as an optical element

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359 9, 359565, 21912168, G02B 532, G02B 2744, G03H 108, B23K 2600

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active

056337353

ABSTRACT:
Optical machining of a workpiece with coherent light scanning a plate with a plurality of subaperture subapertures is disclosed. Each of the subapertures creates a working image which when scanned with a coherent wave front of the design frequency forms in three dimensional space the working image. The working image when registered to a workpiece effect processing of the workpiece, usually ablating an aperture such as a blind via of small dimension. Improved techniques of dimensioning and fabricating the subaperture, creating amplitude modulation with the phase plate, and finally controlling amplitude with optical features close to the limit of producible optical elements is disclosed. The apparatus for the process, the process and the plate for utilization in the process are set forth.

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Swanson, G.J., (1989) "Binary Optics Technology: The Theory and Design of Multi-level Diffractive Optical Elements", Technical Report 854:1-47.

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