Use of compositionally modulated multilayer thin films as resist

Details Use of compositionally modulated multilayer thin films as resist Use of compositionally modulated multilayer thin films as resist

1986-05-29

1988-08-23

Goldberg, E. A.

Electrical resistors

With base extending along resistance element

338314, H01C 1012

Patent

active

047664118

ABSTRACT:
A compositionally modulated multilayer thin film material system for use as a resistive material in metal film resistors wherein at least two different metallic compositions having good resistive properties are deposited alternately in thin film layers on a substrate, the resulting film having improved TCR & TCR Slope characteristics.

REFERENCES:
patent: 4454495 (1984-06-01), Werner et al.

Affiliated with

Also associated with

Rating

Use of compositionally modulated multilayer thin films as resist does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Use of compositionally modulated multilayer thin films as resist, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Use of compositionally modulated multilayer thin films as resist will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-837993