Use of an electronic vernier for evaluation of alignment in semi

Details Use of an electronic vernier for evaluation of alignment in semi Use of an electronic vernier for evaluation of alignment in semi

1984-07-31

1986-01-28

Little, Willis

Geometrical instruments

Miscellaneous

Light direction

33180R, 377 24, 34087037, G01B 700, G08C 2100

Patent

active

045661936

ABSTRACT:
An electronic vernier is presented which detects and quantifies misalignment between layers of material deposited upon a semiconducting wafer. Verniers may be constructed which evaluate alignment between two conducting layers, between two conducting layers and an insulating layer and between a semiconducting layer and a capacitive layer. Circuitry is described which shows how output from a vernier may be detected and quantified in order to evaluate the amount of misalignment.

REFERENCES:
patent: 3221256 (1965-11-01), Walden
patent: 3297941 (1967-01-01), Wolfendale
patent: 3873916 (1975-03-01), Sterki
patent: 3961318 (1976-06-01), Farrand et al.
patent: 4459702 (1984-07-01), Medwin
B. M. M. Henderson, A. M. Gundlach & A. J. Walton, "Integrated Circuit Test Structure Which Uses a Vernier to Electrically Measure Mask Misalignment, Electronics Letters, Oct. 12, 1983, vol. 10, No. 21, pp. 868-869.

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