Optical waveguides – Planar optical waveguide
Reexamination Certificate
2006-07-18
2006-07-18
Kianni, Kaveh (Department: 2883)
Optical waveguides
Planar optical waveguide
C385S130000, C385S131000
Reexamination Certificate
active
07079740
ABSTRACT:
Methods are provided for forming optical devices, such as waveguides, with minimal defect formation. In one aspect, the invention provides a method for forming a waveguide structure on a substrate surface including forming a cladding layer on the substrate surface, forming a core layer on the cladding layer, depositing an amorphous carbon hardmask on the core layer, forming a patterned photoresist layer on the amorphous carbon hardmask, etching the amorphous carbon hardmask, and etching the core material.
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