Use of abrasive tape conveying assemblies for conditioning polis

Details Use of abrasive tape conveying assemblies for conditioning polis Use of abrasive tape conveying assemblies for conditioning polis

1997-10-02

1999-08-31

Scherbel, David A.

Abrading

Abrading process

With tool treating or forming

451 72, 451304, 451305, 451306, 451443, B24B 100

Patent

active

059445858

ABSTRACT:
A conveying assembly in a conditioning sub-assembly for conveying a conditioning surface to a polishing pad during conditioning is described. The conveying assembly includes an arm and a guiding component connected to the arm and adapted to guide the conditioning surface about the conveying assembly, thereby allowing another area of the conditioning surface to advance and become available for conditioning.

REFERENCES:
patent: 3744188 (1973-07-01), Sharpless
patent: 4347689 (1982-09-01), Hammond
patent: 4671018 (1987-06-01), Ekhoff
patent: 5081051 (1992-01-01), Mattingly et al.
patent: 5216843 (1993-06-01), Breivogel et al.
patent: 5536202 (1996-07-01), Appel et al.
patent: 5547417 (1996-08-01), Breivogel et al.
patent: 5643044 (1997-07-01), Lund

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