Upper electrode for manufacturing semiconductors

Details Upper electrode for manufacturing semiconductors Upper electrode for manufacturing semiconductors

1997-07-28

1999-08-03

Vinson, Brian N.

Machines not elsewhere specified

Heat treatment, welding or brazing

Solid material melting, e.g., solder, etc.

1501

Patent

active

D04125134

REFERENCES:
patent: 4857689 (1989-08-01), Lee
patent: 5314574 (1994-05-01), Takahashi
patent: 5320218 (1994-06-01), Yamashita et al.

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