Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
Reexamination Certificate
2000-07-26
2008-07-01
Brahan, Thomas J. (Department: 3654)
Material or article handling
Apparatus for moving material between zones having different...
For carrying standarized mechanical interface type
C414S937000
Reexamination Certificate
active
07393172
ABSTRACT:
In a wafer transfer system wherein a wafer transfer robot linearly reciprocates by a linear motor, dust is prevented from adhering to a wafer.A fixed base9, on which the secondary side11of a linear motor M for linearly reciprocating a wafer transfer robot R is mounted, is mounted on the system body1of a wafer transfer system A in lateral directions and in vertical directions, so that dust dropping in accordance with the flow of clean air K from a clean air supply system4is directly sucked into an exhaust fan5, which is provided on the bottom portion1cof the system body1, to be exhausted without being deposited on the top face of the fixed base9and the secondary side11.
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PCT Notification of Transmittal of Copies of Translation of the International Preliminary Examination Report (PCT/IB/338) issued for PCT/JP00/04987.
International Preliminary Examination Report (PCT/IPEA/409) (translated) issued for PCT/JP00/04987.
Hagiwara Shuuji
Narushima Masaki
Osawa Tetsu
Saeki Hiroaki
Taniyama Yasushi
Brahan Thomas J.
Smith , Gambrell & Russell, LLP
Tokyo Electron Limited
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