Unsticking mirror elements of digital micromirror device

Details Unsticking mirror elements of digital micromirror device Unsticking mirror elements of digital micromirror device

1995-01-10

1998-02-10

Henry, Jon W.

Optical: systems and elements

Deflection using a moving element

With particular mount or drive for element

359224, 359855, 345108, G02B 2608, G02B 508, G02B 7182, G09G 334

Patent

active

057175136

ABSTRACT:
A method of repositioning mirror elements (10) of a digital micromirror device (DMD) that have become stuck in an "on" or an "off" position. The mirror element (10) is irradiated with a short high-energy pulse of visible light. The method may be easily performed during fabrication at the wafer level, and may be followed by a passivation step to prevent further sticking.

REFERENCES:
patent: 5061049 (1991-10-01), Hornbeck
patent: 5096279 (1992-03-01), Hornbeck et al.
patent: 5289172 (1994-02-01), Gale, Jr. et al.
patent: 5387924 (1995-02-01), Gale, Jr. et al.
patent: 5412186 (1995-05-01), Gale
patent: 5444566 (1995-08-01), Gale et al.
patent: 5482564 (1996-01-01), Douglas et al.
patent: 5504504 (1996-04-01), Markandey et al.

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