Fluent material handling – with receiver or receiver coacting mea – Combined
Patent
1992-03-13
1994-07-26
Jacyna, J. Casimer
Fluent material handling, with receiver or receiver coacting mea
Combined
141 4, 141197, 141 70, 141 85, 141 94, 141231, 141312, 141346, 141351, 141367, 414217, 422 40, 901 1, 191 4, 340687, 320 2, 118719, H05K 300, B60L 1100
Patent
active
053320131
ABSTRACT:
An unmanned conveying device for a clean room is capable of restraining a spontaneous oxide film from growing in case that an unmanned carriage is obliged to stop for a long time due to its own cause of a cause at a destination spot while it conveys a semiconductor wafer from one spot to the destination spot. It is a first aspect of the invention to provide the unmanned conveying device which is self-propelled for conveying an object from a ground facility to a destination spot while loading an object to be conveyed thereon, characterized in that the object is accommodated in a container and the container is connected to an inert gas reservoir through a gas supply passage so that the atmosphere in the container can be replaced by a nitrogen gas. It is a second aspect of the invention to provide an unmanned conveying device for a clean room provided with a container for accommodating an object to be conveyed therein, the container being connected to an inert gas reservoir through a gas supply passage so that the air in the container can be replaced by a nitrogen gas, characterized in that the unmanned conveying device has a coupler unit mounted thereon and connected to the gas supply passage and the inert gas reserving source is located on the ground and connected to a coupler unit of a coupler device on the ground through a pipe and the gas supply passage is connected to the inert gas reservoir through both coupler unit.
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Kawano Hitoshi
Sugita Masanao
Yamashita Teppei
Jacyna J. Casimer
Shinko Electric Co. Ltd.
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