Universal substrate holding apparatus

Details Universal substrate holding apparatus Universal substrate holding apparatus

1994-04-26

1995-09-12

Bishop, Steven C.

Chucks or sockets

Expanding

Fluid-pressure actuator

2425712, 279137, 294 981, B23B 3140, B66C 156

Patent

active

054491827

ABSTRACT:
A universal substrate holding apparatus is disclosed comprising:

REFERENCES:
patent: 3777875 (1973-12-01), Sobran
patent: 3945486 (1976-05-01), Cooper
patent: 4680246 (1987-07-01), Aoki et al.
patent: 4783108 (1988-11-01), Fukuyama et al.
patent: 5282888 (1994-02-01), Fukawa et al.
"Airpicker.RTM. Airgripper.TM. Pneumatic Working Devices for Firm Precise Holding" Firestone Industrial Company.

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