Universal specimen prealigner

Details Universal specimen prealigner Universal specimen prealigner

1995-07-10

1996-05-07

Werner, Frank E.

Material or article handling

Article reorienting device

Orienter has article gripping means

198394, 414786, 414936, B65G 4724

Patent

active

055139485

ABSTRACT:
A prealigner (10) employs an X-Y stage (20) and a rotary stage (26) to position and orient a specimen (12) without centering it on the prealigner. The rotary stage is mounted on the X-Y stage and receives a semiconductor wafer (12) in a substantially arbitrary position and orientation. The prealigner employs the rotary stage and translation in only an X-axis direction to scan a peripheral edge (76) of the wafer across an optical scanning assembly (36, 270) to form a polar coordinate map of the wafer. A microprocessor (162) determines the location and orientation of the wafer from the map and cooperates with a motor drive controller (122, 280) to generate control signals for positioning and orienting the wafer in the preselected alignment without changing the location at which the wafer is held.

REFERENCES:
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patent: 4887904 (1989-12-01), Nakazato et al.
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patent: 4938654 (1990-07-01), Schram
patent: 5007784 (1991-04-01), Genov et al.
patent: 5054991 (1991-10-01), Kato
patent: 5064340 (1991-11-01), Genov et al.
patent: 5102280 (1992-04-01), Poduje et al.
patent: 5125791 (1992-06-01), Volovich

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