Universal reticle transfer system

Details Universal reticle transfer system Universal reticle transfer system

2008-01-15

2008-01-15

Fox, Charles A (Department: 3652)

Material or article handling

Device for emptying portable receptacle

With container opening means

C414S217000, C414S419000, C414S397000

Reexamination Certificate

active

07318697

ABSTRACT:
A specially adapted SMIF pod (20) receives and holds one particular type of reticle cassette (36) or reticle holder (132) selected from among dozens of different configurations thereof. The SMIF pod (20) may be interrogated to determine the particular type of reticle cassette (36) or reticle holder (132) carried therein. A reticle transfer system (50) receives a pair of such SMIF pods (20), interrogates each of the SMIF pods (20) to ascertain which type of reticle cassette (36) or reticle holder (132) the SMIF pod (20) carries, and automatically moves reticles (42) through a controlled environment from one reticle cassette (36) or reticle holder (32) to another reticle cassette (36) or reticle holder (132). A reticle reorienter (56) includable in the system (50) also permits automatically exchanging reticles (42) between a reticle carrier (144) and a reticle cassette (36) or reticle holder (132).

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Specification for 300-mm Bottom-Opening Standard Mechanical Interface (SMIF), SEMI19.5-0996, © SEMI 1978, 1996.
Specification for a Reticle SMIF Pod (RSP) Used to Transport and Store 6 Inch or 230 mm Reticles, SEMI E100-0302, © EMI 2000, 2002.
Provisional Mechanical Specification for a 150 mm Reticle SMIF Pod (RSP150) Used to Transport and Store a 6 inch Reticle, SEMI E111-0303, © 2001, 2003.
Provisional Mechanical Specification for a 150 mm Multiple Reticle SMIF Pod (MRSP150) Used to Transport and Store Multiple 6 inch Reticles, SEMI E111-0303, © SEMI 2001, 2003.

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