Universal object holder for microscopes

Details Universal object holder for microscopes Universal object holder for microscopes

1988-09-16

1990-08-07

Arnold, Bruce Y.

Work holders

Relatively movable jaws

Jaw features

269 21, 248362, G02B 2126

Patent

active

049462660

ABSTRACT:
An object holder for use on a microscope exhibits a frame having a shaped-on, deeper-lying contact surface, in which air suction openings are disposed for the fixing of the respective object. An adjustable abutment strip with a shaped-on bearing surface is provided, in order to retain plate-shaped objects, especially wafers or masks of the most widely varying shapes and sizes.

REFERENCES:
patent: 3848962 (1974-11-01), Nelson
patent: 4436385 (1984-03-01), Fischer et al.
patent: 4557568 (1985-12-01), Van Benschoten
patent: 4641930 (1987-02-01), Podvin et al.
patent: 4784377 (1988-11-01), Woodward
patent: 4787800 (1988-11-01), Sone et al.

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