Universal multicontact connection between an EWS probe card and

Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor

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Details

324 725, 324158F, 439 75, G01R 102

Patent

active

051874318

ABSTRACT:
An universal connector employing a plurality of double female contacts installed with a certain clearance in receptacles of a body which may be suspended in a coupling position with a plurality of male contacts arranged on the top face of an EWS probe card and with a plurality of male contacts arranged on the bottom surface of a test card in a test-on-wafer station, provides a multicontact universal connection for any pair of so equipped cards of the inventories of probe cards and of test cards of the station. The connection is easily set up and exhibits excellent stability and uniformity characteristics of the electrical couplings, while reducing sensibly the time necessary for the setting-up and debugging of the test station for initiating a certain cycle of testing-on-wafer. The stability and reproducibility of the electrical couplings provided by the connection increases the precision of the measurements of critical parameters of the integrated devices with a positive effect on the production yield.

REFERENCES:
patent: 3028573 (1962-04-01), Stoehr
patent: 3866119 (1975-02-01), Ardezzone et al.
patent: 4357062 (1982-11-01), Everett
patent: 4518914 (1985-05-01), Okubo et al.
patent: 4667154 (1987-05-01), Allerton et al.
patent: 4806111 (1989-02-01), Nishi et al.
patent: 4859806 (1989-08-01), Smith
patent: 4884024 (1989-11-01), Di Perna
patent: 4952872 (1990-08-01), Driller et al.
"Testing Apparatus with Selectable Probes and Contactors for use with Changeable Patterns", by Faure et al, IBM Tech. Disc. Bull., vol. 20, #9, Feb. 1978, 324-158F.
Contact HC* Hypertac.RTM. reference explaining Hypertac.RTM. socket.

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