Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
Reexamination Certificate
2007-11-09
2010-11-30
Adams, Gregory W (Department: 3652)
Material or article handling
Apparatus for moving material between zones having different...
For carrying standarized mechanical interface type
C104S282000, C198S619000, C414S939000
Reexamination Certificate
active
07841820
ABSTRACT:
The present invention is a wafer transfer system that transports individual wafers between chambers within an isolated environment. In one embodiment, a wafer is transported by a wafer shuttle that travel within a transport enclosure. The interior of the transport enclosure is isolated from the atmospheric conditions of the surrounding wafer fabrication facility. Thus, an individual wafer may be transported throughout the wafer fabrication facility without having to maintain a clean room environment for the entire facility. The wafer shuttle may be propelled by various technologies, such as, but not limited to, magnetic levitation or air bearings. The wafer shuttle may also transport more than one wafer simultaneously. The interior of the transport enclosure may also be under vacuum, gas-filled, or subject to filtered air.
REFERENCES:
patent: 4649830 (1987-03-01), Tanaka
patent: 4805761 (1989-02-01), Totsch
patent: 4826360 (1989-05-01), Iwasawa et al.
patent: 5215420 (1993-06-01), Hughes et al.
patent: 5417537 (1995-05-01), Miller
patent: 5631617 (1997-05-01), Morishita
patent: 6039316 (2000-03-01), Jackson et al.
patent: 6185474 (2001-02-01), Nakamura et al.
patent: 6206176 (2001-03-01), Blonigan et al.
patent: 6430839 (2002-08-01), Kuroda
patent: 6526330 (2003-02-01), Soraoka et al.
patent: 6629503 (2003-10-01), Post
patent: 7269475 (2007-09-01), Hogg et al.
patent: 2002/0040657 (2002-04-01), Davey
patent: 2003/0190220 (2003-10-01), White et al.
Bonora Anthony C.
Gould Richard H.
Hine Roger G.
Krolak Michael
Speasl Jerry A.
Adams Gregory W
Crossing Automation, Inc.
Martine & Penilla & Gencarella LLP
Rudawitz Joshua I
LandOfFree
Universal modular wafer transport system does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Universal modular wafer transport system, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Universal modular wafer transport system will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-4156827