Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
Reexamination Certificate
2007-11-13
2007-11-13
Brahan, Thomas J. (Department: 3654)
Material or article handling
Apparatus for moving material between zones having different...
For carrying standarized mechanical interface type
C104S282000, C198S619000, C414S939000
Reexamination Certificate
active
10234640
ABSTRACT:
The present invention is a wafer transfer system that transports individual wafers between chambers within an isolated environment. In one embodiment, a wafer is transported by a wafer shuttle that travel within a transport enclosure. The interior of the transport enclosure is isolated from the atmospheric conditions of the surrounding wafer fabrication facility. Thus, an individual wafer may be transported throughout the wafer fabrication facility without having to maintain a clean room environment for the entire facility. The wafer shuttle may be propelled by various technologies, such as, but not limited to, magnetic levitation or air bearings. The wafer shuttle may also transport more than one wafer simultaneously. The interior of the transport enclosure may also be under vacuum, gas-filled, or subject to filtered air.
REFERENCES:
patent: 4604020 (1986-08-01), Toro Lira et al.
patent: 4624617 (1986-11-01), Belna
patent: 4779538 (1988-10-01), Fujiwara et al.
patent: 4805761 (1989-02-01), Totsch
patent: 4913059 (1990-04-01), Fujie et al.
patent: 5180048 (1993-01-01), Kawada et al.
patent: 5306380 (1994-04-01), Hiroki
patent: 5460478 (1995-10-01), Akimoto et al.
patent: 5631617 (1997-05-01), Morishita
patent: 5641054 (1997-06-01), Mori et al.
patent: 5645391 (1997-07-01), Ohsawa et al.
patent: 6013920 (2000-01-01), Gordon et al.
patent: 6091498 (2000-07-01), Hanson et al.
patent: 6142722 (2000-11-01), Genov et al.
patent: 6155768 (2000-12-01), Bacchi et al.
patent: 6183615 (2001-02-01), Yasar et al.
patent: 6206176 (2001-03-01), Blonigan et al.
patent: 6220808 (2001-04-01), Bonora et al.
patent: 6271606 (2001-08-01), Hazelton
patent: 6281516 (2001-08-01), Bacchi et al.
patent: 6298685 (2001-10-01), Tepman
patent: 6354781 (2002-03-01), Pan
patent: 6679671 (2004-01-01), Blonigan et al.
patent: 2 778 496 (1998-05-01), None
patent: 4-96204 (1992-03-01), None
patent: WO 99/39386 (1999-08-01), None
patent: 2001031211 (2001-06-01), None
patent: WO 01/10756 (2001-02-01), None
patent: WO 01/14227 (2001-03-01), None
Bonora Anthony C.
Gould Richard H.
Hine Roger G.
Krolak Michael
Speasl Jerry A.
Aysts Technologies, Inc.
Brahan Thomas J.
Martine & Penilla & Gencarella LLP
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