Optics: measuring and testing – By polarized light examination – With light attenuation
Patent
1998-04-07
2000-01-04
Font, Frank G.
Optics: measuring and testing
By polarized light examination
With light attenuation
381247, 381248, G01B 1114
Patent
active
060116277
ABSTRACT:
A universal mapping tool and method for mapping workpieces, such as semiconductor devices, is disclosed and described. The tool comprises a fixed and a movable gripping means adapted to mount a wide range of workpieces, means for optically locating the physical center of the workpiece fiducials mounted on the gripping means, and means for interpreting and storing the data obtained in the mapping operation.
REFERENCES:
patent: 5270560 (1993-12-01), Cheng
patent: 5546179 (1996-08-01), Cheng
Florence, Jr. Robert F.
Mulligan Vincent P.
Tompkins, Jr. Charles R.
Yuen Wing-Fung
Font Frank G.
International Business Machines - Corporation
Ratliff Reginald A.
Townsend Tiffany L.
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