Optics: measuring and testing – Standard
Patent
1984-10-31
1987-01-13
McGraw, Vincent P.
Optics: measuring and testing
Standard
356237, G01N 2188
Patent
active
046360735
ABSTRACT:
A universal calibration standard for surface inspection systems has a plurality of hemispherical pads which simulate the liquid scattering due to particulate contamination. The hemispherical pads scatter light irrespective of angles of illumination and detection and of rotational orientation, and are fabricated using ball-limiting metallurgical techniques. Any number and sizes of pads can be arranged on a substrate and the standard can be repeatedly cleaned, thereby having a long useful life.
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C. A. Gaston, "Standard Wafer for Intensity and Focus Testing," IBM Tehnical Disclosure Bulletin, vol. 24, No. 11A, pp. 5587-5589, Apr. 1982.
C. S. Gati, "Calibration Standard for Oblique Light-Type Particle Detection/Measurement Instruments," IBM Technical Disclosure Bulletin, vol. 24A, No. 11B, pp. 6064-6067, Apr. 1982.
Technical Bulletin, No. 4, Tencor Instruments, Mar. 15, 1984.
R. Iscoff, "Wafer Defect Detection System," Semiconductor International, Nov. 1982, pp. 39-52.
Abzug Jesse L.
Hoel John E.
International Business Machines - Corporation
McGraw Vincent P.
Turner S. A.
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