Unit for measuring planeness

Details Unit for measuring planeness Unit for measuring planeness

1979-03-07

1980-11-18

Corbin, John K.

Optics: measuring and testing

Sample, specimen, or standard holder or support

356352, G01B 902

Patent

active

042342546

ABSTRACT:
A unit for use with an interferometer for measuring the planeness of thin, stiff disks and has asuction means for maintaining the disks in flat abutment with an equalizer plate which is adjustable by means of micrometer spindles to move an opposite side of the disk into flat abutment with a reference plate. The equalizer plate, spindles and suction grid are supported on a base plate which is axially rotatable about a column for movement from underneath the reference plate to place the disks on the suction grid. A clamping means is provided around the column to hold the assembly in a fixed, rigid position.

REFERENCES:
patent: 2820298 (1958-01-01), Bendt
patent: 3045535 (1962-07-01), Jacquinot et al.
patent: 3537798 (1970-11-01), Taft et al.
patent: 3891320 (1975-06-01), Kimura et al.

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