Unit and method for transferring substrates and apparatus...

Details Unit and method for transferring substrates and apparatus... Unit and method for transferring substrates and apparatus...

2011-08-30

2011-08-30

Lowe, Michael S (Department: 3652)

Material or article handling

Apparatus for moving material between zones having different...

C414S805000, C414S806000, C414S935000, C414S939000

Reexamination Certificate

active

08007218

ABSTRACT:
The present invention is related to a method for transferring substrates. The method comprise simultaneously transferring two substrates, by means of a transfer unit, between first support plates disposed to be vertically spaced apart from each other and second support plates arranged abreast in a lateral direction. The transfer unit comprises a top blade and a bottom blade converted to a folded state where they are vertically disposed to face each other and an unfolded state where they rotate at a preset angle in opposite directions. The transfer unit place/take a substrate on/out of the first support plates under the folded state and place/take a substrate on/out of the second support plates under the unfolded state.

REFERENCES:
patent: 6634845 (2003-10-01), Komino
patent: 6669434 (2003-12-01), Namba et al.
patent: 6737826 (2004-05-01), Gilchrist
patent: 6737829 (2004-05-01), Sastry
patent: 7086822 (2006-08-01), Maeda
patent: 7618226 (2009-11-01), Takizawa et al.
patent: 2002/0061248 (2002-05-01), Tepman
patent: 2003/0011338 (2003-01-01), Gilchrist
patent: 2005/0079042 (2005-04-01), Maeda
patent: 2005/0217053 (2005-10-01), Kim et al.
patent: 2005/0220576 (2005-10-01), Kim et al.
patent: 1617789 (2005-05-01), None
patent: 5-021579 (1993-01-01), None
patent: 7-326654 (1995-12-01), None
patent: 10-275848 (1998-10-01), None
patent: 2000-133690 (2000-12-01), None
patent: 2001-135698 (2001-05-01), None
patent: 2002-158272 (2002-05-01), None
patent: 2002-184834 (2002-06-01), None
patent: 2003-170384 (2003-06-01), None
patent: 2003-264215 (2003-09-01), None
patent: 2004-288719 (2004-10-01), None
patent: 2004-535072 (2004-11-01), None
patent: 2007-5582 (2007-01-01), None
patent: 2008-016815 (2008-01-01), None
patent: 2008-135630 (2008-06-01), None
patent: 10-2005-0061925 (2005-06-01), None
patent: 10-2005-0092278 (2005-09-01), None
patent: 1020050092278 (2005-09-01), None

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