Electric lamp and discharge devices: systems – High energy particle accelerator tube – Magnetic field acceleration means
Reexamination Certificate
2005-09-27
2005-09-27
Wong, Don (Department: 2821)
Electric lamp and discharge devices: systems
High energy particle accelerator tube
Magnetic field acceleration means
C315S506000
Reexamination Certificate
active
06949895
ABSTRACT:
A linear acceleration system comprises one or more accelerating stages along an axis and a unipolar electrostatic quadruple lens in series with the one or more accelerating stages. The unipolar electrostatic quadruple lens focuses an ion beam in a direction transverse to the axis. The unipolar electrostatic quadruple lens includes a switching circuit, a first pair of electrodes, and a second pair of electrodes. The switching circuit controllably connects to ground and a first voltage potential. The electrodes of the first pair are located opposite each other and are connected to the switching circuit. The electrodes of the second pair are also located opposite each other and connected to the switching circuit. The second pair of electrodes are biased to a second voltage potential.
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DiVergilio William F.
Huang Youngzhang
Alemu Ephrem
Axcelis Technologies Inc.
Eschweiler & Associates LLC
Wong Don
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