Optical: systems and elements – Lens – With light limiting or controlling means
Reexamination Certificate
2006-07-25
2009-06-09
Harrington, Alicia M (Department: 2873)
Optical: systems and elements
Lens
With light limiting or controlling means
Reexamination Certificate
active
07545585
ABSTRACT:
A system and method for uniformity correction having light leak and shadow compensation is provided. The system includes multiple correction elements and an optical compensation plate. Adjacent correction elements are separated by a gap. The optical compensation plate includes a pattern having multiple gap compensation segments. The pattern has an attenuation which is different than the attenuation of the remaining portions of the optical compensation plate. The location of each compensation segment on the compensation plate corresponds to the location of the corresponding gap between adjacent correction elements in the illumination slot. The width of each compensation segment is dependent upon the angle of the light incident on the correction system. The pattern can be located on the top surface or on the bottom surface of the compensation plate. In addition, the compensation plate can be located above or below the plurality of correction elements.
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ASML Holding N.V.
Harrington Alicia M
Sterne Kessler Goldstein & Fox P.L.L.C.
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