Uniformity correction for lithographic apparatus

Details Uniformity correction for lithographic apparatus Uniformity correction for lithographic apparatus

2008-04-22

2008-04-22

Kim, Peter B. (Department: 2851)

Photocopying

Projection printing and copying cameras

With temperature or foreign particle control

C355S067000, C250S515100

Reexamination Certificate

active

11007580

ABSTRACT:
A uniformity correction module for improving the uniformity of a radiation distribution in a rectangular illumination slit having two longer sides and two shorter sides, including a plurality of movable blades arranged along each long side of the illumination slit and a chamber containing a fluid wherein said movable blades are at least partly immersed in said fluid, and wherein the difference between the refractive index of each blade and the refractive index of said fluid is sufficiently small to prevent significant reflection and refraction at the surface of each blade.

REFERENCES:
patent: 5966202 (1999-10-01), McCullough
patent: 6097474 (2000-08-01), McCullough et al.
patent: 6445439 (2002-09-01), McCullough
patent: 6633364 (2003-10-01), Hayashi
patent: 2003/0002021 (2003-01-01), Sato
patent: 2003/0202165 (2003-10-01), Shiraishi
patent: 2004/0051858 (2004-03-01), Mulkens et al.
patent: 2005/0140957 (2005-06-01), Luijkx et al.

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