Uniform pupil illumination for optical inspection systems

Details Uniform pupil illumination for optical inspection systems Uniform pupil illumination for optical inspection systems

2006-02-21

2006-02-21

Sember, Thomas M. (Department: 2875)

Illumination

Light fiber, rod, or pipe

C362S253000, C362S268000, C356S237200, C359S368000

Reexamination Certificate

active

07001055

ABSTRACT:
An illuminator for uniformly illuminating an entrance pupil of an inspection system in order to increase inspection resolution and sensitivity and improve system-to-system matching is described. The illuminator incorporates at least two lightpipes for spatially and angularly distributing light rays from the illuminator uniformly across the entrance pupil. The illuminator also results in spatial and angular uniformity at the field stop plane. In one embodiment, one lightpipe has a circular shape and a second lightpipe has a rectangular shape.

REFERENCES:
patent: 6461030 (2002-10-01), Shimokawa et al.

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