Uniform pressing apparatus for use in a micro-nano imprint...

Plastic article or earthenware shaping or treating: apparatus – Preform reshaping or resizing means: or vulcanizing means... – Surface deformation means only

Reexamination Certificate

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Details

C425S405100, C425S387100, C425SDIG019, C264S293000

Reexamination Certificate

active

07462029

ABSTRACT:
A uniform pressing apparatus includes upper and lower pressing units and a mold. The lower pressing unit includes a supporting container, a pressure equalizing liquid received within an upwardly opening accommodating space in the container, and pressurizing equipment including a piston member extending into the accommodating space and operable to push the pressure equalizing liquid upwardly in an axial direction toward a substrate disposed on an annular top surface of the container. The upper pressing unit is movable to allow for contact between the mold and the substrate. Subsequently, the piston member is moved to press the substrate against the mold.

REFERENCES:
patent: 5558015 (1996-09-01), Miyashita et al.
patent: 6994541 (2006-02-01), Chung et al.
patent: 7204686 (2007-04-01), Chung et al.

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