Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Patent
1995-03-07
1997-06-17
Tung, T.
Adhesive bonding and miscellaneous chemical manufacture
Differential fluid etching apparatus
With microwave gas energizing means
1566431, 1566461, 216 67, H01L 213065
Patent
active
056393342
ABSTRACT:
A uniform gas flow is provided at the surface of a planar device or wafer in a processing system having a substantially cylindrical chamber through which processing gases flow toward an asymmetrically located outlet port by using an appropriately disposed collar or baffle along the gas stream in the chamber in the plane of the surface of the planar device or wafer.
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Canale Anthony John
Cox Randy Dean
Grimard Dennis Stanley
Hetrick Tracy Charles
International Business Machines - Corporation
Leas James M.
Skladony William P.
Tung T.
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