Uniform energy megasonic transducer using vessel as resonator

Details Uniform energy megasonic transducer using vessel as resonator Uniform energy megasonic transducer using vessel as resonator

2005-04-19

2005-04-19

Dougherty, Thomas M. (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S367000, C134S001300

Reexamination Certificate

active

06882087

ABSTRACT:
A transducer comprising an acoustic energy generating means and a resonator. The acoustic energy generating means generates acoustic energy and is adapted for delivering an approximately uniform amount of acoustic energy to each unit of surface area on a substrate in a given time period when the substrate is rotating. The acoustic energy generating means has a surface area that is less than the surface area of the substrate, and may comprise a wedge shaped piezoelectric crystal. A resonator is attached to the acoustic energy generating means for transmitting the acoustic energy to the substrate.

REFERENCES:
patent: 6539952 (2003-04-01), Itzkowitz
patent: 6720715 (2004-04-01), Bicz
patent: 6730176 (2004-05-01), Kuyel
patent: 6791242 (2004-09-01), Beck et al.

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