Uniform emitter array for display devices

Details Uniform emitter array for display devices Uniform emitter array for display devices

2007-09-18

2007-09-18

Alanko, Anita (Department: 1765)

Electric lamp and discharge devices

Discharge devices having a thermionic or emissive cathode

C216S011000, C216S024000, C216S041000, C216S051000

Reexamination Certificate

active

10715058

ABSTRACT:
An emitter array produced using etch mask and a method for making such an etch mask. The emitter comprises a substrate, forming a conducting layer on the substrate, forming an emitting layer on the conducting layer, forming an etch mask having a controlled distribution of a plurality of mask sizes over the emitting layer, and forming at least one emitter by removing portions of the emitting layer using the etch mask. The method for making the etch mask comprises forming an etch mask layer over an emitting layer, forming a patterning layer having a controlled distribution of mask sizes over the etch mask layer, and forming the etch mask by removing portions of the etch mask layer using the controlled distribution of mask sizes in the patterning layer.

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