Electrolysis: processes – compositions used therein – and methods – Electrolytic coating – Controlling current distribution within bath
Reexamination Certificate
2005-07-19
2005-07-19
Koehler, Robert R. (Department: 1775)
Electrolysis: processes, compositions used therein, and methods
Electrolytic coating
Controlling current distribution within bath
C205S097000, C205S104000, C205S291000, C205S292000, C204S199000, C204S218000, C204S230200, C204S242000, C204S280000
Reexamination Certificate
active
06919010
ABSTRACT:
A substantially uniform layer of a metal is electroplated onto a work piece having a seed layer thereon. The current of a plating cell is provided from an azimuthally asymmetric anode, which is rotated with respect to the work piece (i.e., either or both of the work piece and the anode may be rotating). The azimuthal asymmetry provides a time-of-exposure correction to the current distribution reaching the work piece, whereby peripheral regions of the work piece see less current than central regions over the period of rotation. In some embodiments, the total current is distributed among a plurality of anodes in the plating cell in order to tailor the current distribution in the plating electrolyte over time. Focusing elements may be used to create “virtual anodes” in proximity to the plating surface of the work piece to further control the current distribution in the electrolyte during plating.
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Beyer Weaver & Thomas LLP
Koehler Robert R.
Novellus Systems Inc.
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