Uniform background radiation in maskless lithography

Details Uniform background radiation in maskless lithography Uniform background radiation in maskless lithography

2011-08-30

2011-08-30

Glick, Edward J. (Department: 2882)

Photocopying

Projection printing and copying cameras

Step and repeat

C359S290000, C359S295000, C359S298000

Reexamination Certificate

active

08009270

ABSTRACT:
A device manufacturing method comprising applying patterns to a plurality of arrays of individually controllable elements, such that they modulate a beam of radiation, and projecting the modulated beam of radiation onto a substrate. The patterns applied to the arrays of individually controllable elements are arranged such that pre-determined amounts of background radiation are included in the modulated beam of radiation. The pre-determined amounts of background radiation being different for different locations on the arrays.

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