Unidirectional field generator

Details Unidirectional field generator Unidirectional field generator

1992-07-10

1994-03-01

Weisstuch, Aaron

Chemistry: electrical and wave energy

Apparatus

Coating, forming or etching by sputtering

20419212, C23C 1434

Patent

active

052904164

ABSTRACT:
An apparatus for depositing magnetic material on a substrate uses a magnet assembly formed of permanent magnet pieces that provide a uniaxial magnetic field. The magnet assembly is preferably made from ceramic magnetic tiles that are joined to form an arcuate strip. The permanent magnet strip is located external to the deposition chamber and positioned so that the magnetic flux lines traverse a workpiece or wafer seated within the chamber.

REFERENCES:
patent: 5045166 (1991-09-01), Bobbio

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