Unibody gas plasma source technology

Chemical apparatus and process disinfecting – deodorizing – preser – Chemical reactor – With means applying electromagnetic wave energy or...

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422906, B01J 1908

Patent

active

056981686

ABSTRACT:
A unibody, monolithic, one-piece PBN plasma chamber for an MBE gas plasma source. The chamber has a cylindrical configuration with at least one effusion orifice and a gas inlet opening. The gas inlet opening is preferably communicatively connected to an elongated, tubular inlet member. The inlet member is preferably coupled to a liquid cooled gas source by an intermediary connection member which is preferably constructed of a refxactory metal. The chamber minimizes leakage and maximizes efficiency. A gas plasma source assembly and a method for making the chamber are also disclosed.

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Crucible Weldment--175, 2.75", 4.5" CF Mount Drawing, EPI, 1290 Hammond Road St. Paul, Minnesota, drawn May 18, 1992.

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