Underlayer compositions containing heterocyclic aromatic...

Details Underlayer compositions containing heterocyclic aromatic... Underlayer compositions containing heterocyclic aromatic...

2008-05-20

2008-05-20

Pezzuto, Helen L (Department: 1796)

Synthetic resins or natural rubbers -- part of the class 520 ser

Synthetic resins

Polymers from only ethylenic monomers or processes of...

C525S328500, C430S271100, C430S302000

Reexamination Certificate

active

11175755

ABSTRACT:
A composition suitable for use as a planarizing underlayer in a multilayer lithographic process is disclosed. The inventive composition comprises a polymer containing heterocyclic aromatic moieties. In another aspect, the composition further comprises an acid generator. In yet another aspect, the composition further comprises a crosslinker. The inventive compositions provide planarizing underlayers having outstanding optical, mechanical and etch selectivity properties. The present invention also encompasses lithographic structures containing the underlayers prepared from the compositions of the present invention, methods of making such lithographic structures, and methods of using such lithographic structures to pattern underlying material layers on a substrate.

REFERENCES:
patent: 4855017 (1989-08-01), Douglas
patent: 5362663 (1994-11-01), Bronner et al.
patent: 5429710 (1995-07-01), Akiba et al.
patent: 5561030 (1996-10-01), Holdcroft et al.
patent: 5562801 (1996-10-01), Nulty
patent: 5618751 (1997-04-01), Golden et al.
patent: 5744376 (1998-04-01), Chan et al.
patent: 5801094 (1998-09-01), Yew et al.
patent: 5821469 (1998-10-01), Sanmugham
patent: 5861231 (1999-01-01), Barclay et al.
patent: 5886102 (1999-03-01), Sinta et al.
patent: 5939236 (1999-08-01), Pavelchek et al.
patent: 5948570 (1999-09-01), Kornblit et al.
patent: 5962184 (1999-10-01), Allen et al.
patent: 6037097 (2000-03-01), Bucchignano et al.
patent: 6340789 (2002-01-01), Petritsch et al.
patent: 6400024 (2002-06-01), Drury et al.
patent: 6420088 (2002-07-01), Angelopoulos et al.
patent: 6444408 (2002-09-01), Brock et al.
patent: 6503692 (2003-01-01), Angelopoulos et al.
patent: 6534239 (2003-03-01), Varanasi et al.
patent: 6635401 (2003-10-01), Li et al.
patent: 6686124 (2004-02-01), Angelopoulos et al.
patent: 6730454 (2004-05-01), Pfeiffer et al.
patent: 6800566 (2004-10-01), Lu et al.
patent: 6818381 (2004-11-01), Khojasteh et al.
patent: 6869899 (2005-03-01), Mahorowala et al.
patent: 6949325 (2005-09-01), Li et al.
patent: 1 204 547 (1986-05-01), None
patent: 1-293339 (1989-11-01), None

Affiliated with

Also associated with

Rating

Underlayer compositions containing heterocyclic aromatic... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Underlayer compositions containing heterocyclic aromatic..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Underlayer compositions containing heterocyclic aromatic... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3920071