Under bump metallization layer to enable use of high tin...

Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Solder wettable contact – lead – or bond

Reexamination Certificate

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C257S780000, C257S781000, C257S782000, C257S783000

Reexamination Certificate

active

07064446

ABSTRACT:
Apparatus and methods of fabricating an under bump metallization structure including an adhesion layer abutting a conductive pad, a molybdenum-containing barrier layer abutting the adhesion layer, a wetting layer abutting the molybdenum-containing barrier layer, and high tin content solder material abutting the wetting layer. The wetting layer may be substantially subsumed in the high content solder forming an intermetallic compound layer. The molybdenum-containing barrier layer prevents the movement of tin in the high tin content solder material from migrating to dielectric layers abutting the conductive pad and potentially causing delamination and/or attacking any underlying structures, particularly copper structures, which may be present.

REFERENCES:
patent: 5234153 (1993-08-01), Bacon et al.
patent: 6689680 (2004-02-01), Greer
patent: 6750133 (2004-06-01), Datta
patent: 2004/0164421 (2004-08-01), Tellkamp
patent: 2004/0253803 (2004-12-01), Tomono et al.

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