Uncooled tunneling infrared sensor

Details Uncooled tunneling infrared sensor Uncooled tunneling infrared sensor

1992-06-15

1994-03-29

Anderson, Bruce C.

Radiant energy

Invisible radiant energy responsive electric signalling

Infrared responsive

250306, G01J 500, H01J 3700

Patent

active

052987485

ABSTRACT:
An uncooled infrared tunneling sensor in which the only moving part is a diaphragm which is deflected into contact with a micromachined silicon tip electrode prepared by a novel lithographic process. Similarly prepared deflection electrodes employ electrostatic force to control the deflection of a silicon nitride, flat diaphragm membrane. The diaphragm exhibits a high resonant frequency which reduces the sensor's sensitivity to vibration. A high bandwidth feedback circuit controls the tunneling current by adjusting the deflection voltage to maintain a constant deflection of the membrane which would otherwise change deflection depending upon incident infrared radiation. The resulting infrared sensor will meet or exceed the performance of all other broadband, uncooled, infrared sensors and can be miniaturized to pixel dimensions smaller than 100 .mu.m. The technology is readily implemented as a small-format linear array suitable for commercial and spacecraft applications.

REFERENCES:
patent: 3887937 (1975-06-01), Gatos et al.
patent: 4906840 (1990-03-01), Zdeblick et al.
patent: 5043577 (1991-08-01), Pohl et al.
patent: 5051379 (1991-09-01), Bager et al.
patent: 5103174 (1992-04-01), Wandass et al.

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