Uncooled thin film pyroelectric IR detector with aerogel thermal

Details Uncooled thin film pyroelectric IR detector with aerogel thermal Uncooled thin film pyroelectric IR detector with aerogel thermal

1997-08-14

1999-09-07

Hannaher, Constantine

Radiant energy

Invisible radiant energy responsive electric signalling

Infrared responsive

H01L 2314

Patent

active

059490713

ABSTRACT:
A monolithic infrared detector structure which allows integration of pyroelectric thin films atop low thermal conductivity aerogel thin films. The structure comprises, from bottom to top, a substrate, an aerogel insulating layer, a lower electrode, a pyroelectric layer, and an upper electrode layer capped by a blacking layer. The aerogel can offer thermal conductivity less than that of air, while providing a much stronger monolithic alternative to cantilevered or suspended air-gap structures for pyroelectric thin film pixel arrays. Pb(Zr.sub.0.4 Ti.sub.0.6)O.sub.3 thin films deposited on these structures displayed viable pyroelectric properties, while processed at 550.degree. C.

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patent: 5536965 (1996-07-01), Beratan et al.
patent: 5627082 (1997-05-01), Beratan et al.
patent: 5644838 (1997-07-01), Beratan

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