Radiant energy – Invisible radiant energy responsive electric signalling – Infrared responsive
Patent
1994-04-19
1995-09-19
Hannaher, Constantine
Radiant energy
Invisible radiant energy responsive electric signalling
Infrared responsive
250332, 25037008, 374178, 374184, 257290, G01J 534
Patent
active
054517869
ABSTRACT:
An uncooled thermal detector (10) includes a MIS capacitor (12) that is suspended from a material (26, 26a) having a low thermal conductivity. The MIS capacitor includes a doped semiconductor body portion (14) having a gate dielectric (20), a gate electrode (22), and a second electrode (24) disposed over a surface thereof. In operation, the capacitance of the MIS capacitor at a frequency near a high-frequency/low-frequency transition is measured or sensed. As the temperature of the MIS capacitor increases, the sensed capacitance increases because minority carriers are able to respond faster to a modulating gate voltage. Similarly, if the temperature decreases, the sensed capacitance decreases, because the minority carriers respond more slowly. A high thermal coefficient of capacitance (> 20%/K) is achieved at all gate bias values for which the MIS capacitor is in inversion. By a suitable choice of doping level and the introduction of a deep level (24) to control the minority-carrier lifetime, the transition frequency may be tailored to a desired operating frequency at a given temperature. A method for fabricating the uncooled detector, and an array of same, within a Si film (2) of an SOI wafer (1) is also disclosed.
REFERENCES:
patent: 3497698 (1970-02-01), Phelan, Jr. et al.
patent: 3562425 (1971-02-01), Poirier
patent: 3786441 (1974-01-01), Engeler et al.
patent: 4197469 (1980-04-01), Cheung
patent: 4210922 (1980-07-01), Shannon
patent: 4603258 (1986-07-01), Sher et al.
Stecki et al., "Application of Charge-Coupled Devices to Infrared Detection and Imaging," IEEE, vol. 63, No. 1, 1975 pp. 67-74.
Thom et al., "InSb CCDs and Other Mis Devices for Infrared Applications," 1975 International Conference on the Application of Charge-Coupled Devices, San Diego, Calif., Oct. 29-31, 1975 pp. 31-41.
Sher et al., "Photocapacitive Mis Infrared Detectors", Appl. Phys. Lett 32(11), 1978, pp. 713-715.
Denson-Low W. K.
Glick Edward J.
Hannaher Constantine
Santa Barbara Research Center
Schubert W. C.
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