Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Temperature
Patent
1998-05-29
1998-12-15
Ngo, Ngan V.
Active solid-state devices (e.g., transistors, solid-state diode
Responsive to non-electrical signal
Temperature
257 43, 257532, 257613, H01L 31058
Patent
active
058500987
ABSTRACT:
A thermal detector includes a transducer layer of semiconducting yttrium barium copper oxide which is sensitive at room temperature to radiation and provides detection of infrared radiation. In a gate-insulated transistor embodiment, a layer of ferroelectric semiconducting yttrium barium copper oxide forms a gate insulator layer and increases capacitance of the transistor or latches the transistor according to the polarization direction of the ferroelectric layer. The transducer layer may be formed as an amorphous semiconductor and deposited at room temperature by simple sputtering. The sensitive element can be incorporated into a thermal isolation structure as part of an integrated circuit.
REFERENCES:
patent: 3881181 (1975-04-01), Khajezadeh
patent: 4544441 (1985-10-01), Hartmann et al.
patent: 4745278 (1988-05-01), Hanson
patent: 4754139 (1988-06-01), Ennulat et al.
patent: 4902895 (1990-02-01), Hanson
patent: 4940693 (1990-07-01), Shappirio et al.
patent: 4970395 (1990-11-01), Kruse, Jr.
patent: 5021663 (1991-06-01), Hornbeck
patent: 5090819 (1992-02-01), Kapitulnik
patent: 5171733 (1992-12-01), Hu
patent: 5173474 (1992-12-01), Connell et al.
patent: 5231077 (1993-07-01), Sasaki
patent: 5260225 (1993-11-01), Liu et al.
patent: 5264375 (1993-11-01), Bang et al.
patent: 5270298 (1993-12-01), Ramesh
patent: 5286976 (1994-02-01), Cole
patent: 5288649 (1994-02-01), Keenan
patent: 5304539 (1994-04-01), Allen et al.
patent: 5354989 (1994-10-01), Fenner et al.
patent: 5367167 (1994-11-01), Keenan
patent: 5369280 (1994-11-01), Liddiard
patent: 5519235 (1996-05-01), Ramesh
patent: 5527567 (1996-06-01), Desu et al.
Fabrication of an Infrared Bolometer with a High T.sub.c Superconducting Thermometer, S. Verghese et al., IEEE 27(2), Mar. 1991, pp. 3077-3080.
Fabrication and Measurement of High T.sub.c Superconducting Microbolometers, M. Nahum et al., IEEE 27(2), Mar. 1991, pp. 3081-3084.
The High T.sup.c Superconducting Bolometer, P.L. Richards et al., IEEE 25(2), Mar. 1989, pp. 1335-1338.
Preparation, Patterning, and Properties of Thin YBa.sub.2 Cu.sub.3 O.sub.7 -.delta. Films, J.W.C. de Vries et al., Appl. Phys. Lett. 52(22), May 30, 1988, pp. 1904-1906.
Thermal Fluctuation and 1/f Noise in Oriented and Unoriented Y.sub.1 Ba.sub.2 Cu.sub.3 O.sub.7 -x Films, Robert D. Black et al., Appl. Phys. Lett. 55(21), Nov. 20, 1989, pp. 2233-2235.
Optical Response of Epitaxial Films of YBa.sub.2 CuO.sub.7 -.delta., M.G. Forrester et al., Appl. Phys. Lett., 53(14), Oct. 3, 1988, pp. 1332-1334.
Target Presuputtering Effects on Stoichiometry and Deposition Rate of Y-Ba-Cu-O Thin Films Grown by DC Magnetron Sputtering, T.I. Selinder et al., Appl. Phys. Lett. 52(22), May 30, 1988, pp. 1907-1909.
Measurements of Noise and Temperature Coefficient of Resistance on YBa.sub.2 Cu.sub.3 O.sub.7 -.delta. Thin Films in Magnetic Field, Zeynep Celik-Butler et al., Appl. Phys. Lett. (60(2), Jan. 13, 1992, pp. 246-248.
Pyroelectric Imaging, Bernard M. Kulwicki et al., Texas Instruments Inc., (10 pages).
NonThermal Optical Response of Y-Ba-Cu-O Thin Films, H.S. Kwok et al., Appl. Phys. Lett. 54(24), Jun. 12, 1989, pp. 2473-2475.
Interaction of Picosecond Optical Pulses with High T.sub.c Superconducting Films, W.R. Donaldson et al., Appl. Phys. Lett. 54(24), Jun. 12, 1989, pp. 2470-2472.
Resistive Evaporation of Superconducting Y-Ba-Cu-O Thin Films from a Single Source, Jacob Azoulay et al., Appl. Phys. Lett. 52(24), Jun. 12, 1989, pp. 2467-2469.
Noise Measurement Near the Transition Region in YBa.sub.2 Cu.sub.3 O.sub.7 -.delta. Thin-Film Superconductor, J.N. Lee et al., Physical Review B, Oct. 1, 1989, pp. 6806-6809.
Uncooled Thermal Imaging at Texas Instruments, C. Hanson et al., SPIE 1992, (10 pages).
Low Frequency 1/f Noise Measurements in YBa.sub.2 Cu.sub.3 O.sub.7 Thin Films and the Implications for HTS IR Detectors, R.C. Lacoe et al., IEEE 27(2), Mar. 1991, pp. 2832-2835.
Design of High-T.sub.c Superconducting Bolometers for a Far Infrared Imaging Array, S. Verghese et al., IEEE 3(1), Mar. 1993, pp. 2115-2119.
Pyroelectric Infrared Array Sensors Made of c-Axis-Oriented la-Modified PbTiO.sub.3 Thin Films, Ryoichi Takayama et al., Sensors and Actuators, A21-A23 (1990) pp. 508-512.
Surface-Micromachined PbTiO.sub.3 Pyroelectric Detectors, D.L. Polla et al., App. Phys. Lett. '92, (59), 3539 (3 pages).
A Comparison of the Non-Bolometric Microwave Response with the Bolometric Optical Response of TL- and BI- Oxide Superconductors, J.D. Chern et al., IEEE 3(1), Mar. '93, pp. 2128-2131.
Status of Uncooled Infrared Imagers, Robert E. Flannery et al., SPIE vol. 1689, 1992/379-395.
Macrimachined Bolometer Arrays Achieve Low-Cost Imaging, R. Andrew Wood et al., Laser Focus World, Jun. 1993, pp. 101-106.
High-Performance Infrared Thermal Imaging with Monolithic Silicon Focal Planes Operating at Room Temparature, R.A. Wood, IEEE, 1993, pp. 175-177.
Epitaxial Growth on NbN on an Ultrathin MgO/Semiconductor System, Masayoshi Tonouchi et al., J. Appl. Phys., 64(3), 1 Aug. 1987, pp. 961-966.
Vanadium Oxide Films for Optical Switching and Detection, Hubert Jerominek et al., Optical Engineering/Sep. 1993, vol. 32, No. 9 pp. 2092-2099.
High T.sub.c Superconductor Bolometer with Record Performance, J.C. Brasunas et al., Appl. Phys. Lett (64(6), 7 Feb. 1994, pp. 777-778.
YBa.sub.2 Cu.sub.3 O.sub.7 Superconductor Microbolometer Arrays Fabricated by Silicon Micromachining, B.R. Johnson et al., IEEE 3(1), Mar. 1993, pp. 2856-2859.
High-Temperature Superconducting Microbolometer, T.G. Stratton et al., Appl. Phys. Lett. 57(1), Jul. 2, 1990, pp. 99-100.
Semiconductor YBaCuO Thin Films for Uncooled Infrared Bolometers, P.C. Shan et al., Journal Appl. Phys., 78(12), Dec. 15, 1995, pp. 7334-7339.
Growth of the Superconducting Phase in Ceramic Y1.2Ba0.8 CuOy Samples, R. Wordenweber et al., appl. Phys. Lett. (52(4), Jan. 25, 1988, pp. 317-319.
Antenna-coupled High-T.sub.c Air-Bridge Microbolometer on Silicon, Appl. Phys. Lett. 65(6), Aug. 8, 1994, pp. 773-775.
Butler Donald P.
Celik-Butler Zeynep
Jahanzeb Agha
Shan Pao-Chuan
Ngo Ngan V.
Research Corporation Technologies Inc.
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