Electrical transmission or interconnection systems – Plural supply circuits or sources – Substitute or emergency source
Patent
1996-10-07
1998-09-08
Shoop, Jr., William M.
Electrical transmission or interconnection systems
Plural supply circuits or sources
Substitute or emergency source
307 44, 307 85, 307 86, 505869, H02J 304
Patent
active
058048898
ABSTRACT:
A un-interruptible power supply (UPS) apparatus for a diffusion furnace used in semiconductor device fabrication. The diffusion furnace consists of a power electronic subsystem coupled to a three-phase utility power source via two series-connected normally-open main circuit breaker switches, an automatic control unit, and a direct-current power supply. The automatic control unit controls the operation of the diffusion furnace. The UPS apparatus includes a UPS unit having a power input connected to a node between the two series-connected normally-open main circuit breaker switches. A first normally-open circuit breaker has a switch connected between the output of the UPS unit and the power input of the automatic control unit. A second normally-open circuit breaker has a switch connected between a first phase power line of the three-phase utility power source and the input of the direct-current power supply. A third normally-closed circuit breaker has a switch connected to the output of the UPS unit. A fourth normally-open circuit breaker has a switch connected between the output of the UPS unit and the input of the direct-current power supply. In operation, the apparatus is switched on to maintain the power supply to the diffusion furnace for a predetermined time when there is a main power line failure.
REFERENCES:
patent: 3778634 (1973-12-01), Hanrihan
patent: 4692632 (1987-09-01), Gaul et al.
patent: 5138185 (1992-08-01), Weinstock
patent: 5210685 (1993-05-01), Rosa
patent: 5376828 (1994-12-01), Kim et al.
Chung Chin-Chuan
Hu Chu Lin
Sang Albert
Wei Kuo-Tunt
Paladini Albert W.
Shoop Jr. William M.
United Microelectronics Corp.
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