Optical: systems and elements – Optical modulator – Having particular chemical composition or structure
Patent
1998-02-12
2000-07-25
Epps, Georgia
Optical: systems and elements
Optical modulator
Having particular chemical composition or structure
427567, 427596, 438779, 257289, G02F 100, B05D 306, H01L 2131, H01L 2994
Patent
active
060942959
ABSTRACT:
An electro-conductive ultraviolet light transmitting Ga.sub.2 O.sub.3 material (10) with a metallic oxide phase is deposited on a GaAs substrate or supporting structure (12). The Ga.sub.2 O.sub.3 material or thin layer comprises a minor component of metallic IrO.sub.2. The Ga.sub.2 O.sub.3 thin layer may be positioned using thermal evaporation (106) of Ga.sub.2 O.sub.3 or of a Ga.sub.2 O.sub.3 containing a compound from an Iridium crucible (108). Alternatively, the Ir may be co-evaporated (110) by electron beam evaporation. The electro-conductive ultraviolet light transmitting material Ga.sub.2 O.sub.3 with a metallic oxide phase is suitable for use on solar cells and in laser lithography.
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An article entitled "Thermodynamic and photochemical stability of low interface state density Ga.sub.2 O.sub.3 -GaAs structures fabricated by in situ molecular beam epitaxy" from Appl. Phys. Lett. 69(3), M. Passlack et al., pp. 302-304 (Jul. 15, 1996).
An article entitled "Recombination velocity at oxide-GaAs interfaces fabricated by in situ molecular beam epitaxy" from Appl. Phys. Lett. 68(25), M. Passlack et al., pp. 3605-3607, (Jun. 17, 1996).
An article entitled "Quasistatic and high frequency capacitance-voltage characterization of Ga.sub.2 O.sub.3 -GaAs structures fabricated by in situ molecular beam epitaxy" from Appl. Phys. Lett. vol. 68, No. 8, M. Paasalck et al., pp. 1099-1101 (Feb. 19, 1996).
An article entitled "Anisotropy of electrical and optical properties in B-Ga.sub.2 O.sub.3 single crystals " from Appl. Phys. Lett. 71(7), N. Ueda et al., pp. 933-935 (Aug. 18, 1997).
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Abrokwah Jonathan Kwadwo
Passlack Matthias
Yu Zhiyi (Jimmy)
Epps Georgia
Gorrie Gregory J.
Motorola Inc.
Spector David N.
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